Research on Modeling and Scheduling of Cluster Tools with Reentrant Process

Abstract

Abstract: Cluster tools reconfigured are increasingly adopted in wafer fabrication. With single-wafer processing technology, the productivity and quality of semiconductor manufacturing have been improved. The configurations of cluster tools and constraints of operation processes were proposed. Due to the increase of processing requirements of wafer revisiting, the scheduling of cluster tools becomes more complicated. Thus, modeling, performance analyzing and scheduling of cluster tools with reentrant process were reviewed. Meanwhile, an illustrative example was given to show the feasibility of simulation scheduling. By analyzing the advantages and disadvantages of research methods available, approaches and future directions which would be effective for operation control of cluster tools with wafer revisiting were proposed.

Key words: wafer fabrication, reentrant process, cluster tools, modeling and simulation, scheduling

CLC Number:

TP278

Pan Chunrong, Li Liang. Research on Modeling and Scheduling of Cluster Tools with Reentrant Process[J]. Journal of System Simulation, 2016, 28(4): 772-782.

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