Abstract: Piezoelectric vibration generator made in MEMS can supply infinitely and continuously energy for low power electronic devices. In order to improve the adaptive capacity to environment of cantilever piezoelectric vibration generator, through the finite element simulation and experimental study, effect law of additional mass on the natural frequencies and output voltage was analyzed. Results show that, as the mass increases, natural frequency of the piezoelectric beam decreases monotonically, while relative displacement of the end monotonically increases; in the same incentive environment, output voltage of piezoelectric beam with close to the natural frequency and same to the end amplitude are basically consistent.

Key words: cantilever, vibration energy harvesting, micro vibration generator, finite element simulation