Robust Model and Optimization of Anti-impact Performance for MEMS Ring Gyroscope

Abstract

Abstract: In order to reduce the influence of parameter variation on anti-impact performance of micro mechanical gyroscope, a kind of MEMS ring gyroscopes was chosen as the research object, applying the method of explicit dynamic finite element analysis and design of experiment, influence of parameter variation was studied with significant analysis, and reasonable design parameters were decided. Mathematical model of anti-impact robustness optimization for ring gyroscope was established, in which maximum impact stress and performance variation were minimized as the optimal goal. Ultimately, the optimal solution set could be obtained by means of pareto multi-objective genetic algorithm. Simulation results show that while the normal working performance of the ring gyroscope is fulfilled, the anti-impact performance of which is robuster. It provides a new and effective method for anti-impact design of micro gyroscope.

Key words: MEMS ring gyroscope, anti-impact performance, finite element analysis, robust design

CLC Number:

TP212

Jiang Tao, Sun Lin. Robust Model and Optimization of Anti-impact Performance for MEMS Ring Gyroscope[J]. Journal of System Simulation, 2016, 28(4): 793-799.

References

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