基于可重入加工组合设备的建模与调度研究

摘要/Abstract

摘要： 晶圆加工中越来越广泛地采用可重构的自动化组合设备,其单晶圆加工技术提高了晶圆制造的生产效率和加工质量。介绍了组合设备的结构特征及其加工过程运行的约束条件,由于晶圆重入加工需求的增加,组合设备的调度变得更加复杂。回顾了组合设备可重入加工过程的建模、性能分析及其调度等研究工作,分析了重入加工的Petri网建模,调度和控制方法的优劣性,并通过例子阐述了仿真调度的可行性。提出了组合设备重入加工运行控制的研究方法及未来的研究方向。

关键词: 晶圆制造, 重入加工, 组合设备, 建模与仿真, 调度

Abstract: Cluster tools reconfigured are increasingly adopted in wafer fabrication. With single-wafer processing technology, the productivity and quality of semiconductor manufacturing have been improved. The configurations of cluster tools and constraints of operation processes were proposed. Due to the increase of processing requirements of wafer revisiting, the scheduling of cluster tools becomes more complicated. Thus, modeling, performance analyzing and scheduling of cluster tools with reentrant process were reviewed. Meanwhile, an illustrative example was given to show the feasibility of simulation scheduling. By analyzing the advantages and disadvantages of research methods available, approaches and future directions which would be effective for operation control of cluster tools with wafer revisiting were proposed.

Key words: wafer fabrication, reentrant process, cluster tools, modeling and simulation, scheduling

中图分类号:

TP278

潘春荣, 黎良. 基于可重入加工组合设备的建模与调度研究[J]. 系统仿真学报, 2016, 28(4): 772-782.

Pan Chunrong, Li Liang. Research on Modeling and Scheduling of Cluster Tools with Reentrant Process[J]. Journal of System Simulation, 2016, 28(4): 772-782.

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