Abstract: Considering the scheduling model and schedulibility for single-arm cluster tools with wafer residency time constraints, a mixed- integer linear programming model with both single-arm and temporal constraints for processing module was constructed. The rationality of equivalent processing time for concurrency module was theoretically proved. Based on this, the periodic wafer processing and transportation procedure for both single-arm and processing module was analyzed. Meanwhile, the schedulibility conditions for cluster tools were proved. The simulation experiments were carried out to test the model and schedulable conditions, and the results reveal the validity and feasibility of the presented model.

Key words: semiconductor manufactory, cluster tools, dual-blade robot, schedulability analysis