面向混流晶圆比例的单臂组合设备自适应调度

doi:10.16182/j.issn1004731x.joss.23-1281

系统仿真学报 ›› 2024, Vol. 36 ›› Issue (12): 2906-2916.doi: 10.16182/j.issn1004731x.joss.23-1281

• 论文 • 上一篇

面向混流晶圆比例的单臂组合设备自适应调度

潘春荣¹, 崔煜¹, 熊文清¹, 周浩¹, 罗继亮¹^,²^,³

^1.江西理工大学机电工程学院，江西赣州 341000
^2.华侨大学信息科学与工程学院，福建厦门 361021
^3.华侨大学福建省电机控制与系统优化调度工程技术研究中心，福建厦门 361021

收稿日期:2023-10-24 修回日期:2023-12-08 出版日期:2024-12-20 发布日期:2024-12-20
第一作者简介:潘春荣(1973-)，男，教授，博导，博士，研究方向为机电一体化、制造过程的优化控制、智能制造。
基金资助:
国家自然科学基金(72161019);江西理工大学高层次人才科研专项基金(205200100648);江西省引进培养创新创业高层次人才“千人计划”(jxsq2020102091)

Research on Adaptive Scheduling of Single-arm Cluster Tools for Throughput Ratio of Multiple Wafer Types with Concurrent Processing

Pan Chunrong¹, Cui Yu¹, Xiong Wenqing¹, Zhou Hao¹, Luo Jiliang¹^,²^,³

^1.School of Mechanical and Electrical Engineering, Jiangxi University of Science and Technology, Ganzhou 341000, China
^2.College of Computer Science and Technology, Huaqiao University, Xiamen 361021, China
^3.Fujian Engineering Research Center of Motor Control and System Optimal Schedule, Xiamen 361021, China

Received:2023-10-24 Revised:2023-12-08 Online:2024-12-20 Published:2024-12-20

摘要/Abstract

摘要：

为解决混流加工使得晶圆的制造过程容易发生死锁和完工节点模糊的问题，以主流的全并行加工两种晶圆的单臂组合设备为研究对象，建立了Petri网模型描述系统运行过程，开发了控制策略以避免系统死锁；基于该Petri网模型分析了尽早加工调度策略运行下系统的调度时间特性，针对单个生产监控周期内共享模块品种切换的不同情形，确定了监控周期内机械手的动作循环序列；以晶圆产出比例为调度目标，开发了一种求解生产方案的自适应调度算法，通过调节共享模块加工晶圆的类型，使每个监控周期内的晶圆产出比例自适应地调整，不断地逼近期望的生产状态。通过实例验证了算法的可行性与有效性。

关键词: 组合设备, 产出比例, Petri网, 生产方案, 自适应算法

Abstract:

Concurrent processing makes the wafer fabrication process prone to deadlocks and completion node ambiguity. A Petri net model is established to describe the system operation process by taking for the single-arm cluster tools for fully parallel processing of two wafer types as the research object, and a control strategy is developed to avoid the system deadlock. Based on the Petri net model, the temporal properties of the system is analyzed based on earliest starting strategy, and the action cycle sequence of robot is determined during the monitoring cycle for different scenarios of lot switching in a single production monitoring cycle. An adaptive scheduling algorithm is developed to obtain the production schedule, which can adaptively adjust the ratio of wafer output in each monitoring cycle by setting the type of wafers processed in the shared module, so that the desired production state is continuously approached by adjusting the ratio of wafer output in each monitoring cycle. The feasibility and effectiveness of the algorithm are verified by examples.

Key words: cluster tools, throughput ratio, Petri net, production scheme, adaptive algorithm

中图分类号:

TP273.2

潘春荣,崔煜,熊文清等 . 面向混流晶圆比例的单臂组合设备自适应调度[J]. 系统仿真学报, 2024, 36(12): 2906-2916.

Pan Chunrong,Cui Yu,Xiong Wenqing,et al . Research on Adaptive Scheduling of Single-arm Cluster Tools for Throughput Ratio of Multiple Wafer Types with Concurrent Processing[J]. Journal of System Simulation, 2024, 36(12): 2906-2916.

图/表 9

图1

图2

表1

赋时库所和赋时变迁时间

符号	动作说明	时间
x_i,₁	机械手将手中的晶圆装载至C_i 模块中， $i ∈ {a, b, s}$	l(装载时长)
x_0,1	机械手将手中的晶圆装载至真空锁中	l(装载时长)
x_i,₂	机械手从C_i 模块中卸载晶圆至机械手上， $i ∈ {a, b, s}$	u(卸载时长)
x_0,2	机械手从真空锁中卸载晶圆至机械手上	u(卸载时长)
t_i,j	机械手夹持着晶圆从C_i 模块移动到C_j 模块， $i, j ∈ {0, a, b, s}$	m(移动时长)
y_i	机械手空载移动到C_i 模块， $i ∈ {a, b, s}$	m(移动时长)
y₀	机械手空载移动到真空锁	m(移动时长)
p_i	晶圆在C_i 模块中加工， $i ∈ {0, a, b, s}$	τ_i ∈[α_i，∞](晶圆在C_i 模块停留时长)
q_i	机械手在C_i 模块等待卸载晶圆， $i ∈ {a, b, s}$	ω_i ∈[0，∞](在C_i 模块等待时长)
q₀	机械手在真空锁等待卸载晶圆	ω₀∈[0，∞](在真空锁等待时长)
z_i,j	用于连接两个相邻的变迁， $i ∈ N 3, j ∈ {1, 2}$	0(无时间关联)

表1

图3

图4

图5

表2

表3

图6

参考文献 19

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WFP	算法1				算法2
WFP	最佳的SPMAS	最佳晶圆产出比例	晶圆总产能	求解时间/s	最佳的SPMAS	最佳晶圆产出比例	晶圆总产能	求解时间/s
(1，1，1)	A	1.21	161	<1	A、B	0.97	156	<1
(1，1，2)	AB	1.00	172	<1	AB、AB	1.00	172	<1
(1，1，3)	ABB	0.92	188	<1	BBB、AAA	1.02	192	<1
(2，1，1)	A	1.05	174	<1	A、A	1.05	174	<1
(2，1，2)	BB	0.92	188	<1	BB、AB	1.06	192	<1
(2，2，2)	AB	1.13	211	<1	AB、BB	0.97	205	<1
(3，2，1)	B	1.13	211	<1	B、B	1.13	211	<1

WFP	算法1		算法2
WFP	晶圆产出比例	误差率Δ/%	晶圆产出比例	误差率Δ/%
(1，1，1)	0.60	40	0.60	40
(1，1，2)	0.75	25	0.75	25
(1，1，3)	0.90	10	0.90	10
(1，1，4)	1.05	5	1.05	5
(1，1，5)	0.87	13	1.01	1
(1，1，6)	1	0	1	0

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面向混流晶圆比例的单臂组合设备自适应调度

Research on Adaptive Scheduling of Single-arm Cluster Tools for Throughput Ratio of Multiple Wafer Types with Concurrent Processing

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