多孔硅芯炉感应加热线圈磁场效应的仿真分析

doi:10.16182/j.issn1004731x.joss.201806023

系统仿真学报 ›› 2018, Vol. 30 ›› Issue (6): 2182-2189.doi: 10.16182/j.issn1004731x.joss.201806023

多孔硅芯炉感应加热线圈磁场效应的仿真分析

李金刚, 刘高原

西安理工大学自动化与信息工程学院,陕西西安 710048

收稿日期:2016-07-29 修回日期:2016-11-14 出版日期:2018-06-08 发布日期:2018-06-14
作者简介:李金刚(1968-),男,河北,博士,副教授,研究方向为感应加热电源与无线功率传输技术;刘高原(1991-),男,陕西乾县,硕士,研究方向为感应加热电源。
基金资助:
陕西省工业科技攻关项目(2014K06-18)

Simulation Analysis of Magnetic Field Effect in Induction Heating Coil of Porous Silicon Core Furnace

Li Jingang, Liu Gaoyuan

College of Automation and Information Engineering, Xi'an University of Technology, Xi'an 710048, China

Received:2016-07-29 Revised:2016-11-14 Online:2018-06-08 Published:2018-06-14

摘要/Abstract

摘要： 多孔感应加热线圈技术能解决区熔法单孔线圈拉制单晶硅效率低、成本高等问题。但因相关理论研究不足,技术不成熟,导致同时拉制的多根单晶硅形状不同。根据电磁场理论建立了多孔线圈磁场模型,分析了工作原理,研究了多孔线圈磁场分布规律。为直观证明同时拉制多根单晶硅的机理,建立了基于Matlab和Ansys的数学模型,在Matlab中计算并绘制磁感应强度分布图,运用Ansys仿真软件对实际过程进行模拟,证明理论分析的正确性和线圈设计的实用性。

关键词: 单晶硅, 多孔线圈, 感应加热, 数值分析, 磁场分布

Abstract: A new technology of porous coil disposable drawing a plurality of single crystal silicon rod can solve the problem of low efficiency and high cost of zone melting method of single induction heating coil in drawing monocrystalline silicon. However,the missing of the theoretical research and mature technology leads to different sizes of monocrystalline silicon rods. According to electromagnetic theory,Some characterisitics of the porous coil are studied,including magnetic field model,operating principle,magnetic field distribution.To prove the mechanism of the technology, a mathematical model of the porous coil is constructed based on Matlab and Ansys software. The magnetic flux density distribution is calculated and analyzed by Matlab.Numerical simulation for induction heating process is carried out with Ansys. The simulation results prove the theoretical analysis and the practicality of the designed porous coil.

Key words: monocrystalline silicon, porous coil, induction heating, numerical analysis, magnetic distribution

中图分类号:

TM924.5

李金刚, 刘高原. 多孔硅芯炉感应加热线圈磁场效应的仿真分析[J]. 系统仿真学报, 2018, 30(6): 2182-2189.

Li Jingang, Liu Gaoyuan. Simulation Analysis of Magnetic Field Effect in Induction Heating Coil of Porous Silicon Core Furnace[J]. Journal of System Simulation, 2018, 30(6): 2182-2189.

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多孔硅芯炉感应加热线圈磁场效应的仿真分析

Simulation Analysis of Magnetic Field Effect in Induction Heating Coil of Porous Silicon Core Furnace

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