环形微机械陀螺抗冲击性能的稳健性模型与优化

系统仿真学报 ›› 2016, Vol. 28 ›› Issue (4): 793-799.

环形微机械陀螺抗冲击性能的稳健性模型与优化

姜涛, 孙林

同济大学机械与能源工程学院,上海 201804

收稿日期:2014-11-30 修回日期:2015-01-26 出版日期:2016-04-08 发布日期:2020-07-02
作者简介:姜涛(1969-),男,河南,副教授,博士,研究方向为微电子装备、微结构拓扑智能设计等;孙林(1991-),男,江苏,硕士,研究方向为微型机械电子。
基金资助:
国家自然科学基金(51075305)

Robust Model and Optimization of Anti-impact Performance for MEMS Ring Gyroscope

Jiang Tao, Sun Lin

College of Mechanical Engineering, Tongji University, Shanghai 201804, China

Received:2014-11-30 Revised:2015-01-26 Online:2016-04-08 Published:2020-07-02

摘要/Abstract

摘要： 为减小尺寸变异对微陀螺仪抗冲击性能的影响,以MEMS环形陀螺仪为研究对象,应用有限元显式动力学分析技术和试验设计方法,通过显著性分析方法研究了各设计参数变异对抗冲击性能的影响,并从中筛选出合理设计变量,进而以最大冲击应力与性能变异的最小化为目标,建立了环形陀螺仪抗冲击稳健性优化的数学模型,并通过Pareto多目标遗传算法获得最优设计参数。仿真验证表明采用该设计方法可使环形微机械陀螺在满足正常工作性能的同时,使其抗冲击性能的稳健性也得到明显改善,为微陀螺仪抗冲击设计提供了新的有效方法。

关键词: 环形微机械陀螺仪, 抗冲击性能, 有限元分析, 稳健性设计

Abstract: In order to reduce the influence of parameter variation on anti-impact performance of micro mechanical gyroscope, a kind of MEMS ring gyroscopes was chosen as the research object, applying the method of explicit dynamic finite element analysis and design of experiment, influence of parameter variation was studied with significant analysis, and reasonable design parameters were decided. Mathematical model of anti-impact robustness optimization for ring gyroscope was established, in which maximum impact stress and performance variation were minimized as the optimal goal. Ultimately, the optimal solution set could be obtained by means of pareto multi-objective genetic algorithm. Simulation results show that while the normal working performance of the ring gyroscope is fulfilled, the anti-impact performance of which is robuster. It provides a new and effective method for anti-impact design of micro gyroscope.

Key words: MEMS ring gyroscope, anti-impact performance, finite element analysis, robust design

中图分类号:

TP212

姜涛, 孙林. 环形微机械陀螺抗冲击性能的稳健性模型与优化[J]. 系统仿真学报, 2016, 28(4): 793-799.

Jiang Tao, Sun Lin. Robust Model and Optimization of Anti-impact Performance for MEMS Ring Gyroscope[J]. Journal of System Simulation, 2016, 28(4): 793-799.

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