基于层次化显微特征建模与仿真的缺陷检测方法
邹静, 谭谞, 毛俊佶, 高海东, 谭建荣
Defect Detection Method Based on Hierarchical Microscopic Feature Modeling and Simulation
Zou Jing, Tan Xu, Mao Junji, Gao Haidong, Tan Jianrong
系统仿真学报
.
2026, (1): 1
-13
.
DOI: 10.16182/j.issn1004731x.joss.25-1166