微焦点X射线管的仿真设计

doi:10.16182/j.issn1004731x.joss.25-1028

系统仿真学报 ›› 2026, Vol. 38 ›› Issue (9): 2607-2615.doi: 10.16182/j.issn1004731x.joss.25-1028

• 论文 • 上一篇

微焦点X射线管的仿真设计

赵浩东¹, 魏世宗², 俞道龙², 刘志霞², 陈越中², 徐季¹

^1.南京信息工程大学集成电路学院，江苏南京 210000
^2.南京信息工程大学电子与信息工程学院，江苏南京 210000

收稿日期:2025-10-23 修回日期:2025-12-12 出版日期:2026-09-30 发布日期:2026-10-02
通讯作者: 徐季
第一作者简介:赵浩东(2001-)，男，硕士生，研究方向为微焦点X射线源。
基金资助:
国家重点研发计划课题(2022YFB4401301);国家自然科学基金(92264103);国家自然科学基金(62401399)

Design and Research of a Microfocus X-Ray Tube

Zhao Haodong¹, Wei Shizong², Yu Daolong², Liu Zhixia², Chen Yuezhong², Xu Ji¹

^1.School of Integrated Circuits, Nanjing University of Information Science and Technology, Nanjing 210000, China
^2.School of Electronics and Information Engineering, Nanjing University of Information Science and Technology, Nanjing 210000, China

Received:2025-10-23 Revised:2025-12-12 Online:2026-09-30 Published:2026-10-02
Contact: Xu Ji

摘要/Abstract

摘要：

随着高分辨率成像与微纳检测技术的迅速发展，微焦点X射线源在工业无损检测、生物医学成像及材料微结构分析等领域展现出广泛应用前景。实现亚10微米级焦点尺寸对于提升空间分辨率具有关键意义，但传统X射线管受限于热源尺寸、电子束发散与聚焦能力，难以兼顾焦点微型化与足够的辐射强度。采用CST有限元电磁仿真软件对热阴极电子枪进行建模。通过仿真分析第一阳极对阴极发射电子的影响，并引入带聚焦电极的控制结构对发射电子进行预聚焦，以获得理想的电子束形状和稳定发射电流。系统性分析了聚焦电极、栅极电压及阳极电压对焦斑尺寸和管电流的影响。最终设计实现焦点尺寸约5 $μ m$ 的微聚焦X射线管。

关键词: 焦点尺寸, 聚焦电极, 管电流, 电子枪, 聚焦结构

Abstract:

With the rapid advancement of high-resolution imaging and Micro-nano detection technology, microfocus X-ray sources show great potential for applications in industrial non-destructive testing, biomedical imaging, and material microstructure analysis. Achieving a focal spot size below 10  $μ m$ is essential for enhancing spatial resolution. However, traditional X-ray tubes are constrained by heat source dimensions, electron beam divergence, and limited focusing capabilities, which makes it challenging to simultaneously achieve focal spot miniaturization and adequate radiation intensity. In this study, a hot cathode electron gun is modeled using CST particle studio. Simulations are conducted to analyze the influence of the first anode on electrons emitted from the cathode.A control structure with a focusing electrode is implemented to pre-focus the emitted electrons, aiming to achieve an appropriate electron beam shape and stable emission current. The effects of the focusing electrode, gate voltage, and anode voltage on the focal spot size and tube current are systematically analyzed. Ultimately,a micro-focus X-ray tube with a focal spot size of approximately 5 $μ m$ is achieved in the final design.

Key words: focus size, focusing electrode, tube current, electron gun, focus on structure

中图分类号:

TN24

赵浩东,魏世宗,俞道龙等 . 微焦点X射线管的仿真设计[J]. 系统仿真学报, 2026, 38(9): 2607-2615.

Zhao Haodong,Wei Shizong,Yu Daolong,et al . Design and Research of a Microfocus X-Ray Tube[J]. Journal of System Simulation, 2026, 38(9): 2607-2615.

图/表 14

图1

图2

图3

图4

图5

图6

图7

图8

图9

图10

表1

电子枪结构尺寸 (mm)

R	$R 1$	$R 2$	d	h	$h 3$	d₃
2.4	2	1	2	1.5	0.5	1.6

表1

表2

聚焦结构尺寸 (mm)

D	$D 1$	$D 2$	$h 1$	$h 2$	$d 1$	$d 2$
1	8	7.5	6	1.5	2	5

表2

图11

图12

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微焦点X射线管的仿真设计

Design and Research of a Microfocus X-Ray Tube

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