非晶SiO<sub>2</sub>/Si界面缺陷及其钝化/去钝化反应机制

洪卓呈, 左旭

Amorphous SiO₂/Si Interface Defects and Mechanism of Passivation/Depassivation Reaction

Hong Zhuocheng, Zuo Xu

系统仿真学报 . 2020, (12): 2362 -2375 . DOI: 10.16182/j.issn1004731x.joss.20-FZ0474E